A micromachined thin-film gas flow sensor for microchemical reactors
نویسندگان
چکیده
منابع مشابه
Micromachined thin-film gas flow sensor for microchemical reactors
As microchemical systems (MCS) have gained in importance since their introduction in the last decade, it has become recognized that appropriate sensing and control capabilities are needed if MCS are to reach their potential. In this context, we present a study of the working behavior of a novel thin-film micro flow sensor which is integrated with a silicon microreactor with a submillimeter chan...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2006
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/16/4/009